In recent years, micro pump technology has garnered significant attention and established itself as a pivotal area of research, particularly within the domain of microfluidic applications. The growing interest in developing micro pump systems stems from the critical need to integrate efficient and precise pumping mechanisms into microfluidic devices, enabling accurate and controlled fluid delivery at micro- and nanoscale levels. This review explores the latest advancements and research in micro pump technology, with a primary focus on piezoelectric micro pumps due to their versatility and high performance. The study offers a comprehensive analysis of how operational parameters, diaphragm material selection, variations in piezoelectric layer geometries, and microvalve designs influence the efficiency and reliability of micro pumps. Furthermore, the review examines the diverse functional requirements of micro pumps and highlights their applications in a broad range of fields, including biomedicine, targeted drug delivery, thermal management systems, fuel cell technology, and other emerging areas of technological innovation. By analyzing the interplay of these factors, this paper underscores the critical role of micro pumps in advancing microfluidic systems and their transformative impact across various industries.